Semiconductor Devices: Physics And Technology, 2Nd Edition
- Publish Date: 2001-09-07
- Binding: Hardcover
- Author: Simon M. Sze
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.